Temperature Study of Sub-Micrometric ICs by Scanning Thermal Microscopy
نویسندگان
چکیده
منابع مشابه
Belgirate, Italy, 28-30 September 2005 TEMPERATURE MEASUREMENT OF SUB-MICROMETRIC ICs BY SCANNING THERMAL MICROSCOPY
Surface temperature measurements were performed with a Scanning Thermal Microscope. We aim at proving an eventual sub-micrometric resolution of this metrology when using a wollaston wire probe of micrometric size. A dedicated CMOS device was designed with arrays of lines 0.35μm in size with 0.8 μm and 10μm periods. Integrated Circuits with or without a passivition layer were tested. To enhance ...
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2 Department of Engineering Mechanics, Tsinghua University, Beijing 100084, People’s Republic of China. 3 To whom correspondence should be addressed. E-mail: [email protected] With the development of new emerging technologies, many objects in scientific research and engineering are of sub-micrometer and nanometer size, such as microelectronics, micro-electro-mechanical systems (MEMS), bio...
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ژورنال
عنوان ژورنال: IEEE Transactions on Components and Packaging Technologies
سال: 2007
ISSN: 1521-3331
DOI: 10.1109/tcapt.2007.901748